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Windows 7 All In One Reset Tool 8.37 MB. ZoneAlarm-Pro.10.0.243.000-ZWT. ZoneAlarm-Pro-Software-Download.zip.1. Field of the Invention
The present invention relates generally to a semiconductor memory device, and more particularly to a layout of a ground pad of a memory device.
2. Description of the Related Art
A ground pad is widely used to connect a ground line to a ground ring and a ground line. The ground ring and the ground line are connected to a power source by a ground line when a ground pad is formed over the ground pad.
FIG. 1 is a plan view of a ground pad of a conventional static random access memory (SRAM). FIG. 2 is a sectional view taken along line II—II of FIG. 1. FIG. 3 is a sectional view taken along line III—III of FIG. 1.
As shown in FIGS. 1 and 2, a ground pad 11 formed of metal is formed over a metal layer 11A of a semiconductor substrate (not shown) in a peripheral area of a memory cell region and a peripheral area around the memory cell region.
As shown in FIGS. 1 and 3, the ground pad 11 is formed at the bottom of a contact hole 12 that penetrates an interlayer insulating layer 13 and is formed to a predetermined depth.
A ground ring 14 is formed over the ground pad 11 to be connected to a power source by a ground line. In FIG. 1, the ground ring 14 is connected to the ground line in a contact hole 15 formed to a predetermined depth.
The ground ring 14 is connected to the ground line by a ground pad 11 that is formed in a predetermined area of the peripheral area of the memory cell region and is formed to a predetermined depth, thereby ground potential is prevented from dropping even when the ground potential be359ba680
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